전자현미경

      Resolution    3.0nm (at 30kV, SE Image)   10nm (at 3kV, SE Image)     Magnification    x15 ~ x300,000     Accelerating voltage    0.5kV~30kV     Electron gun    Tungsten filament, Pre-centered cartridge filament     Objective IRIS    Variable aperture with 4 different diameters (30um,50um,100um,200um)     Image Shift    ±50um     Stage    Manual Stage   X: 40mm, Y: 65mm, T: -20°~90°, R:360°   Auto Stage   Z: 5~60mm     Sample Size    Horizontal: 130mm, Vertical: 60mm     Automation Function    Filament Saturation   Auto Focus    Auto Brightness   Auto Contrast     Display Mode    Reduced window mode: 320 x 240 pixel   TV screen scan mode: 640 x 4800 pixel   Slow screen scan mode: 800 x 600 pixel (3steps)   Photo screen capture mode 1: 1280 x 960 pixel   Photo screen capture mode 2: 2560 x 1920 pixel   Photo screen capture mode 3: 5120 x 3840 pixel   Waveform observation mode     Vacuum system    Turbo molecular pump (3분 이내 진공가능)   Rotary pump     Optional Detector    EDS(Energy dispersive spectroscopy)   WDS(Wavelength dispersive spectroscopy)   BSE(Backscattered Electron)   EBSD( Electron Back Scattered Diffraction)     Dimension & Weight    Main system: 770(W)x880(D)x1500(H)mm, 350kg   Operation table: 850(W)x800(D)x700(H)mm, 10kg